ELECTRODELESS THIN-FILM CONDUCTANCE MEASUREMENTS USING THE SOMMER-TANNER METHOD

Authors
SEVERENS RJ VERHOEVEN HJM SCHAEPKENS M VANDESANDEN MCM SCHRAM DC
Citation
Rj. Severens et al., ELECTRODELESS THIN-FILM CONDUCTANCE MEASUREMENTS USING THE SOMMER-TANNER METHOD, Review of scientific instruments, 67(10), 1996, pp. 3624-3626
Citations number
4
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
67
Issue
10
Year of publication
1996
Pages
3624 - 3626
Database
ISI
SICI code
0034-6748(1996)67:10<3624:ETCMUT>2.0.ZU;2-8
Abstract
A method to determine the electrical conductance of thin films such as a-Si:H that does not require contacting electrodes is presented. This method, introduced by Sommer and Tanner, is based on measuring the ph ase shift of a capacitive transmission line. The lower detection limit for the geometry used here is 10(-11) Omega(-1), which makes it suita ble to determine the photoconductivity of a-Si:H thin films. The metho d shows reasonable agreement with classical conductance measurements u sing sputtered electrodes. (C) 1996 American Institute of Physics.