ELECTROCHEMICAL-CELL FOR THE PREPARATION OF POROUS SILICON

The design of a practical electrochemical cell to fabricate porous sil icon layers (PSLs) is described. This cell is useful to rapidly produc e PSLs without the need to prepare new electrochemical solutions. The cell is also adapted for the formation of PSLs in the dark or under il lumination, with nitrogen flow in the solution. The special design of the silicon wafer support guarantees a homogeneous electrical contact and no solution infiltration into it. (C) 1996 American Institute of P hysics.