ELECTROCHEMICAL-CELL FOR THE PREPARATION OF POROUS SILICON

Citation
R. Guerrerolemus et al., ELECTROCHEMICAL-CELL FOR THE PREPARATION OF POROUS SILICON, Review of scientific instruments, 67(10), 1996, pp. 3627-3630
Citations number
17
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
ISSN journal
00346748
Volume
67
Issue
10
Year of publication
1996
Pages
3627 - 3630
Database
ISI
SICI code
0034-6748(1996)67:10<3627:EFTPOP>2.0.ZU;2-2
Abstract
The design of a practical electrochemical cell to fabricate porous sil icon layers (PSLs) is described. This cell is useful to rapidly produc e PSLs without the need to prepare new electrochemical solutions. The cell is also adapted for the formation of PSLs in the dark or under il lumination, with nitrogen flow in the solution. The special design of the silicon wafer support guarantees a homogeneous electrical contact and no solution infiltration into it. (C) 1996 American Institute of P hysics.