MICROWAVE COMPATIBLE ELECTROMAGNETIC VALVE FOR PLASMA DEPOSITION STUDIES

A microwave compatible electromagnetic valve capable of discharging sa turated vapors in vacuum for shock wave formation and subsequent pulse d plasma deposition is presented. The valve discharges vapors of 1-5 a tm and 75 degrees C with open duration times of 36-178 mu s into vacuu m. A theoretical model describing rarefaction wave motion coupled with a valve dynamic model was used to determine critical open duration ti me required for driving a shock wave in the experimental system. Valve design, operating characteristics, and rarefaction wave dynamics for H-2, He, Ar, and CO2 internal to the valve are described. (C) 1996 Ame rican Institute of Physics.