S. Mononobe et M. Ohtsu, FABRICATION OF A PENCIL-SHAPED FIBER PROBE FOR NEAR-FIELD OPTICS BY SELECTIVE CHEMICAL ETCHING, Journal of lightwave technology, 14(10), 1996, pp. 2231-2235
We propose a novel method by chemical etching using hydrofluoric (HF)
acid and a buffered HF solution (BHF) to fabricate a pencil-shaped fib
er probe for near-field optics, We succeeded in producing such probes
with high reproducibility using a dispersion-compensating fiber having
the high GeO2 doped core, The method involves tapering of the claddin
g, then sharpening of the core, The fabricated probe has a conical tip
with a cone angle of 20 degrees and an apex diameter of less than 10
nm.