ION-BEAM CHANNELING STUDY OF COBALT IMPLANTED SAPPHIRE

Authors
JAROLI E SZILAGYI E KHANH NQ PECZ B
Citation
E. Jaroli et al., ION-BEAM CHANNELING STUDY OF COBALT IMPLANTED SAPPHIRE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 118(1-4), 1996, pp. 123-127
Citations number
19
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
118
Issue
1-4
Year of publication
1996
Pages
123 - 127
Database
ISI
SICI code
0168-583X(1996)118:1-4<123:ICSOCI>2.0.ZU;2-R
Abstract
Rutherford backscattering spectrometry combined with channeling and Tr ansmission Electron Microscopy (TEM) were used for investigation of co balt implanted single crystalline alpha-Al2O3. The energy of the cobal t ions was 150 keV with various doses, To get good crystalline quality after implantation, a thermal annealing at 1500 degrees C for 1 hour was carried out. Angular scans were performed along different axes, We found that crystalline precipitates grew epitaxially into the hexagon al host crystal. The presence of precipitates was also proven by cross sectional TEM measurements that showed their typical diameter between 10-50 nm. Other than these precipitates no cobalt was found by energy dispersive spectroscopy.