CROSS-SECTIONS FOR LIGHT-ELEMENT ANALYSIS BY NON-RUTHERFORD SCATTERING

The non-Rutherford cross sections of light elements, from Be to F, for theta(lab) = 165 degrees are reviewed. New results for cross section measurements of Be, B and other light elements at theta(lab) = 165 deg rees in the energy range of 1.0-5.3 MeV are presented. Non-Rutherford backscattering for light elements and Rutherford backscattering for he avy elements were used to measure stoichiometries, depth profiles and light element contaminants in thin films of different compounds. The s uitable energy range of the alpha-particles used for major light eleme nts analysis is discussed. In the 3-10 MeV energy range, significant l ight element sensitivity enhancements were observed, while the heavy e lements showed classical Rutherford behavior.