RECOIL SELECTION BY PULSE-SHAPE DISCRIMINATION IN ELASTIC RECOIL DETECTION ANALYSIS WITH ALPHA-PARTICLES (ALPHA-ERDA)

Authors
MAAS AJH KLEIN SS SIMONS DPL DEVOIGT MJA
Citation
Ajh. Maas et al., RECOIL SELECTION BY PULSE-SHAPE DISCRIMINATION IN ELASTIC RECOIL DETECTION ANALYSIS WITH ALPHA-PARTICLES (ALPHA-ERDA), Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 118(1-4), 1996, pp. 268-273
Citations number
11
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
118
Issue
1-4
Year of publication
1996
Pages
268 - 273
Database
ISI
SICI code
0168-583X(1996)118:1-4<268:RSBPDI>2.0.ZU;2-2
Abstract
In elastic recoil detection analysis (ERDA) with alpha-particles, reco ils can be separated from scattered projectiles by using detectors wit h a thin depletion layer and a pulse shape discrimination (PSD) circui t [S.S. Klein and H.A. Rijken, Nucl. Instr. and Meth. B 66 (1992) 393] . Improved performance is obtained with a multi-parameter data acquisi tion system; recoil events are more easily and accurately selected and sensitivity is improved by a factor of 5 to 1 X 10(14) at/cm(2) for o xygen on amorphous silicon. The typical surface depth resolution is 10 nm. Two alternative PSD circuits are proposed neither of them using f ast electronics. Examples are given of profiling carbon and oxygen in thin films of Si, C and SiOxNy.