STOICHIOMETRIC CHANGES OF SI, COSI2 AND TISI2 DURING LOW-ENERGY OXYGEN BOMBARDMENT IN COMBINATION WITH OXYGEN BLEED-IN

Authors
BRIJS B DELEU J STORM W DECOSTER W VANDERVORST W
Citation
B. Brijs et al., STOICHIOMETRIC CHANGES OF SI, COSI2 AND TISI2 DURING LOW-ENERGY OXYGEN BOMBARDMENT IN COMBINATION WITH OXYGEN BLEED-IN, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 118(1-4), 1996, pp. 541-546
Citations number
11
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
118
Issue
1-4
Year of publication
1996
Pages
541 - 546
Database
ISI
SICI code
0168-583X(1996)118:1-4<541:SCOSCA>2.0.ZU;2-P
Abstract
Rutherford backscattering spectrometry was used to investigate the nea r surface compositional changes and the internal layer variations of S i, CoSi2 and TiSi2 during 12 keV O-2(+) bombardment with and without o xygen bleed-in. Experiments have been carried out with the angle of in cidence between the sputter beam and the normal at 26 and 40 degrees. The results show the incorporation of oxygen, leading to oxide formati on, preferential sputtering of Si in the silicides and the formation o f a surface oxide during oxygen flooding.