SEPARATION OF SCATTERED IONS AND NEUTRALS IN MEDIUM-ENERGY ION-SCATTERING SPECTROSCOPY

Authors
KOBAYASHI T DORENBOS G SHIMODA S IWAKI M AONO M
Citation
T. Kobayashi et al., SEPARATION OF SCATTERED IONS AND NEUTRALS IN MEDIUM-ENERGY ION-SCATTERING SPECTROSCOPY, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 118(1-4), 1996, pp. 584-587
Citations number
8
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
118
Issue
1-4
Year of publication
1996
Pages
584 - 587
Database
ISI
SICI code
0168-583X(1996)118:1-4<584:SOSIAN>2.0.ZU;2-0
Abstract
For the purpose of surface and buried interface structural analysis, w e have developed a medium-energy (similar to 100 keV) ion scattering ( MEIS) spectrometer with a time-of-flight (TOF) energy analyzer that ca n detect scattered ions and neutrals separately at a scattering angle of 180 degrees. One of the reasons to use the TOF analyzer rather than an electrostatic one is to avoid the ambiguity in the ion neutralizat ion probability. Indeed, we have found that the neutralization probabi lity of 100 keV He+ ions backscattered from a Si(001) sample exhibits remarkable angular variations.