R. Sandrik et al., ANALYSIS OF STOICHIOMETRY OF HIGH-T-C SUPERCONDUCTING FILMS BY RBS AND PIXE METHODS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 118(1-4), 1996, pp. 602-607
Lateral inhomogeneity has been studied in thin films of YBa2Cu3O7-delt
a, deposited from aerosol on MgO substrates. RBS and PIXE analyses dis
tinguished areas that were found to differ in the critical temperature
T-c values. The PIXE results confirmed the differences in composition
between those areas. Variations in layer thicknesses were found by me
ans of RBS analysis. Measurements made with a microbeam showed that th
e film within each of those areas was homogeneous. However, significan
t variations in the Y-Ba-Cu-O stoichiometry and local changes in the f
ilm thickness were found in the intermediate zone between areas with T
-c = 85 K and T-c less than or equal to 80 K.