CHANNELING ANALYSES OF EPITAXIALLY GROWN YB2C3O7-X THIN-FILM

The structure features of YBCO {110}-films on (110) SrTiO3 substrate w ere studied by 3.05 MeV He2+ and 6 MeV Li3+ ion channeling measurement . Li3+ ion was used to enhance the mass resolution of Ba, Y and Cu. An gular scan along the [110] directions reflected a misorientation betwe en the film and the substrate. A sample consisting of three distinctiv e layers deposited under three different conditions were used to study the relationships between deposition conditions and crystallographic orientation. The angle of misorientation is consistent with a tilting in compensating. for the lattice parameter difference between the subs trate and the YBCO film.