NANOMETER PRECISION OF SEMICONDUCTOR MULTILAYER GROWTH - DISCUSSION

Authors
STEENSON DP FOXON CT LIPPENS D
Citation
Dp. Steenson et al., NANOMETER PRECISION OF SEMICONDUCTOR MULTILAYER GROWTH - DISCUSSION, Philosophical transactions-Royal Society of London. Physical sciences and engineering, 354(1717), 1996, pp. 2422-2423
Citations number
1
Categorie Soggetti
Multidisciplinary Sciences
Journal title
Philosophical transactions-Royal Society of London. Physical sciences and engineering → ACNP
ISSN journal
09628428
Volume
354
Issue
1717
Year of publication
1996
Pages
2422 - 2423
Database
ISI
SICI code
0962-8428(1996)354:1717<2422:NPOSMG>2.0.ZU;2-T