Electrical conduction in LiI thin films has been measured in situ duri
ng growth as a function of film thickness and temperature. Films grown
at 27 degrees C exhibited an enhancement of the ionic conduction of s
imilar to 40X the bulk value in a region extending similar to 100 nm a
bove the interface. The enhanced conduction was not stable and decreas
ed with a log(time) dependence during annealing at the growth temperat
ure. The activation energy for conduction was 0.47+/-0.03 eV, approxim
ately equal to the value for extrinsic conduction in bulk LiI. Films g
rown at 100 degrees C, on the other hand, showed no enhancement near t
he interface, and a nearly linear increase in conductance with thickne
ss after an initial nucleation stage. The conductivity of these films
was stable at and above the growth temperature and exhibited an activa
tion energy of 0.75+/-0.03 eV, which is comparable to the value for in
trinsic LiI. X-ray diffraction measurements on the samples showed that
all films were cubic LiI. Films grown near room temperature had a str
ong (002) orientation while those grown at elevated temperatures were
(111) with a mosaic spread of <0.4 degrees. The data show conclusively
that there is no enhancement due to space-charge layer formation at t
he film/substrate interface. On the other hand, the data are all consi
stent with a model that assumes the conduction enhancement is caused b
y the overlapping strain fields of dislocations formed during growth.