SPECTRAL CHARACTERISTICS OF PLANE MULTILA YER AMPLITUDE DIFFRACTION GRATINGS FOR THE SOFT-X-RAY RANGE

Several spectral characteristics of plane multilayer amplitude molybde num-silicon diffraction grating (1000 and 2000 lines mm(-1)), fabricat ed by electron-beam lithography, were determined with a broadband lase r-plasma source of soft x-rays. The gratings, with the multilayer stru cture period 11.5 nm, were investigated at near-normal incidence and a t an angle of incidence of 36 degrees in a quasi-stigmatic spectrograp h system with moderate dispersion. The spectral profile of resonant re flection by the gratings was determined in the first and second interf erence orders of the multilayer structure far different angles of inci -dence. The line spectrum of multiply charged FV and FVI ions was reco rded in the 16.0-18.5 nn range by means of these multilayer gratings a nd the resolving power of the gratings was estimated.