J. Humlicek et al., FAR-INFRARED ELLIPSOMETRY OF DEPLETED SURFACE-LAYER IN HEAVILY-DOPED N-TYPE GAAS, Applied physics letters, 69(17), 1996, pp. 2581-2583
Far-infrared ellipsometric spectra of n-type (100) GaAs display sharp
features in the range of the longitudinal optical phonon of intrinsic
material, originating in the surface depletion region. We compare meas
ured relative ellipsometric phase shifts with model calculations of th
e graded depletion layer. A very good agreement is observed, enabling
us to determine the surface potential. (C) 1996 American Institute of
Physics.