ATOMIC-FORCE MICROSCOPE INVESTIGATIONS OF TOPOGRAPHY, LATERAL FORCE AND ELECTRICAL-PROPERTIES OF METAL-CONTAINING AMORPHOUS, HYDROGENATED CARBON THIN-FILMS
P. Kazimierski et H. Lehmberg, ATOMIC-FORCE MICROSCOPE INVESTIGATIONS OF TOPOGRAPHY, LATERAL FORCE AND ELECTRICAL-PROPERTIES OF METAL-CONTAINING AMORPHOUS, HYDROGENATED CARBON THIN-FILMS, International journal of electronics, 81(4), 1996, pp. 467-472
Amorphous, hydrogenated carbon thin films have been prepared in an RF
supported plasma process including ferrocene as an organometallic. Dif
ferences in electrical conductivity and elastic modulus are suggested
to be due to a modification of the carbonaceous matrix. For locally re
solved measurements of the electrical conductivity, an atomic force mi
croscope, working in the contact mode, has been employed.