ATOMIC-FORCE MICROSCOPE INVESTIGATIONS OF TOPOGRAPHY, LATERAL FORCE AND ELECTRICAL-PROPERTIES OF METAL-CONTAINING AMORPHOUS, HYDROGENATED CARBON THIN-FILMS

Authors
KAZIMIERSKI P LEHMBERG H
Citation
P. Kazimierski et H. Lehmberg, ATOMIC-FORCE MICROSCOPE INVESTIGATIONS OF TOPOGRAPHY, LATERAL FORCE AND ELECTRICAL-PROPERTIES OF METAL-CONTAINING AMORPHOUS, HYDROGENATED CARBON THIN-FILMS, International journal of electronics, 81(4), 1996, pp. 467-472
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
International journal of electronics → ACNP
ISSN journal
00207217
Volume
81
Issue
4
Year of publication
1996
Pages
467 - 472
Database
ISI
SICI code
0020-7217(1996)81:4<467:AMIOTL>2.0.ZU;2-T
Abstract
Amorphous, hydrogenated carbon thin films have been prepared in an RF supported plasma process including ferrocene as an organometallic. Dif ferences in electrical conductivity and elastic modulus are suggested to be due to a modification of the carbonaceous matrix. For locally re solved measurements of the electrical conductivity, an atomic force mi croscope, working in the contact mode, has been employed.