J. Sarlund et al., CHARACTERIZATION OF ETCHING PROCEDURE IN PREPARATION OF CDTE SOLAR-CELLS, Solar energy materials and solar cells, 44(2), 1996, pp. 177-190
An etching procedure for forming a low resistance contact to polycryst
alline CdTe thin films in CdS/CdTe solar cells was studied, The etchin
g solution used was a mixture of HNO3, H3PO4 and H2O. X-ray diffractio
n (XRD), secondary ion mass spectrometry (SIMS) and electric measureme
nts revealed that the etching results in a formation of crystalline te
llurium on the film surface, thereby increasing substantially the cond
uctivity of the surface layer. The total process was found to consist
of three steps: (i) immediately after an immersion into the etching so
lution there was a certain induction period with no discernible change
s, (ii) a subsequent reaction step during which poorly crystallized el
emental tellurium was formed, gaseous byproducts liberated and the sur
face changed its colour, and (iii) after taking out of the etching sol
ution the tellurium crystallized causing a strong decrease in the shee
t resistance. In situ XRD and electric measurements were carried out t
o follow the third step. The chemical aspects of the three steps as we
ll as their contributions to the reproducibility and control of the ov
erall etching procedure have been considered.