DEVELOPMENT AND EVALUATION OF ONLINE DETECTION TECHNIQUES FOR POLAR ORGANICS IN ULTRAPURE WATER

An on-line monitor that can perform rapid trace detection of polar org anics such as acetone and isopropanol in ultrapure water (UPW) is nece ssary to efficiently recycle water in semiconductor manufacturing faci lities. The detection of these analytes is problematic due to their hi gh solubility in water, resulting in low partitioning into sensor coat ings for direct water analysis or into the vapor phase for detection b y vapor phase analyzers. After considering various options, two conven tional laboratory techniques have been evaluated: gas chromatography a nd ion mobility spectroscopy. In addition, optimizations of sensor coa ting materials and sample preconditioning systems were performed with the goal of a low-cost, chemical sensor system for this application. R esults from these evaluations, including recommendations for meeting t he needs of this application, are reported.