TRANSIENT SHEATH IN A CYLINDRICAL BORE FOR FINITE-RISE-TIME VOLTAGE PULSES

Authors
SHERIDAN TE
Citation
Te. Sheridan, TRANSIENT SHEATH IN A CYLINDRICAL BORE FOR FINITE-RISE-TIME VOLTAGE PULSES, Surface & coatings technology, 85(3), 1996, pp. 204-208
Citations number
9
Categorie Soggetti
Materials Science, Coatings & Films
Journal title
Surface & coatings technology → ACNP
ISSN journal
02578972
Volume
85
Issue
3
Year of publication
1996
Pages
204 - 208
Database
ISI
SICI code
0257-8972(1996)85:3<204:TSIACB>2.0.ZU;2-B
Abstract
A model predicting the evolution of the sheath in a plasma-filled cyli ndrical bore for finite-rise-time voltage pulses is presented. It is f ound that the maximum ion impact energy and the proportion of energeti c ions decrease as the pulse rise time increases. For applications in which it is desirable to maximize the ion impact energy (e.g., plasma- based ion implantation), shorter rise times are better.