RADIO-FREQUENCY-MAGNETRON-SPUTTERED CDS CDTE SOLAR-CELLS ON SODA-LIMEGLASS/

We report the fabrication of an 11.6% efficient, polycrystalline thin- film CdS/CdTe solar cell in which both semiconductor layers were depos ited by planar-magnetron-radio-frequency sputtering at 380 degrees C o n commercially available soda-lime float-glass substrates coated with SnO2:F. We show that the magnetron magnetic held is critical to obtain ing high cell efficiency. Much stronger photoluminescence and higher e lectrical conductivity are found in films and cells grown with unbalan ced-field magnetrons. The magnetic field dependence is interpreted as arising from the enhanced electron and ion bombardment of the film gro wth interface when unbalanced magnetrons are used. (C) 1996 American I nstitute of Physics.