The evolution of a crystal surface during growth interruption when ada
tom diffusion along the surface is the prevailing smoothing process is
studied both theoretically and numerically. During this process, 2D i
slands and holes interact via adatom diffusion changing their sizes an
d making the surface smoother. Surface smoothing is described in terms
of two main processes that determine mode and rate of surface smoothi
ng: Ostwald ripening of islands and capturing of adatoms wandering on
the surface by the holes. This description offers to determine reflect
ion high-energy electron diffraction (RHEED) specular intensity in a s
tep-density approximation.