Due to its luminescence in the blue-green spectral range, Ga2Se3 has b
ecome a subject of extensive research. Thin epitaxial Ga2Se3 layers we
re grown on GaAs(100) and GaP(100) for the first time by metalorganic
chemical vapour deposition (MOCVD). The structural and optical propert
ies were investigated by transmission electron microscopy, Raman spect
roscopy and photoluminescence (PL). Raman spectra were taken in a temp
erature range from 100 K to 600 K using excitation energies of Ar+ and
Kr+ ion lasers. Additionally the photoluminescence of the layers was
measured using ultraviolet (UV) excitation. The results of this study
are compared and discussed with those of other growth techniques.