We summarize some recent work related to electrochromic tungsten-oxide
-based thin films. The electronic structure of crystalline cubic (pero
vskite) WO3 and HWO3 was calculated from first principles. It was foun
d, that hydroxide formation was energetically favoured. Experimental s
tudies were made on heavily disordered films prepared by reactive magn
etron sputtering in Ar + O-2 with and without CF4 addition and substra
te bias. Structural studies, indicated that the electron bombardment a
ssociated with a positive substrate bias led to grain growth and parti
al crystallization while maintaining a high density of W=O double bond
s presumably on grain boundaries. Tandem films, with a thin protective
layer of electron bombarded oxide covering a thicker oxyfluoride laye
r, were able to combine rapid dynamics of the electrochromism with goo
d electrochemical durability. Oblique angle sputtering in Ar + O-2 led
to films whose microstructure comprised inclined columns. Pronounced
angular selective transmittance was found to coexist with electrochrom
ism.