A MICROFABRICATED SOLID-STATE SECONDARY LI BATTERY

A thin-film solid-state Li/TiS2 microbattery has been developed at Eve ready Battery Company (EBC). It is fabricated using sputtering for dep osition of the contacts, TiS2 cathode, and glassy electrolyte. High va cuum evaporation is used to deposit a LiI layer and Li anode. The outs tanding secondary performance with thousands of deep discharges, the c apability of current density, as high as several mA/cm(2) and the long term stability both on-shelf and during cycling make the EBC Microbat tery superior to any other microbattery reported to date.