FABRICATION OF PROTON CONDUCTOR SRCEO3 THIN-FILMS BY EXCIMER-LASER DEPOSITION

Authors
YUGAMI H NAITO H ARASHI H ISHIGAME M
Citation
H. Yugami et al., FABRICATION OF PROTON CONDUCTOR SRCEO3 THIN-FILMS BY EXCIMER-LASER DEPOSITION, Solid state ionics, 86-8, 1996, pp. 1307-1310
Citations number
12
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical
Journal title
Solid state ionics → ACNP
ISSN journal
01672738
Volume
86-8
Year of publication
1996
Part
2
Pages
1307 - 1310
Database
ISI
SICI code
0167-2738(1996)86-8:<1307:FOPCST>2.0.ZU;2-7
Abstract
Thin films of a perovskite proton conductor SrCeO3 were fabricated by ArF excimer laser deposition method using bulk SrCeO3 ceramic targets. For incident laser fluences greater than similar to 1 J/cm(2), ablati ve deposition was observed. SrCeO3 films with predominant growth along the (200) and (121) were deposited on Si and MgO substrates at 600 de grees C. We have found that the oxygen pressure during deposition is t he most critical parameter for obtaining oriented films.