The surface electrical conductivity was separated from the bulk one by
simultaneous conductivity measurements of two different surface struc
tures formed on a single Si-wafer surface in ultrahigh vacuum. We have
found that the surface conductivities for the Si(lll)-root 3 x root 3
-Ag and -5 x 2-Au superstructures are inherently higher than that of t
he Si(lll)-7 x 7 clean surface by (11.5 +/- 0.5) x 10(-5) A/V and (5 /- 1) x 10(-5) A/V, respectively. These excess conductivities are esti
mated to originate mainly from the surface space-charge layer, althoug
h the surface-state-band conduction is considered to partly contribute
, especially on the root 3 x root 3-Ag surface.