THE STATE-OF-THE-ART AND FUTURE-TRENDS IN DRAMS

The production of future generation DRAM devices critically requires R &D of process technologies for highly integrable and cost effective pr ocesses. Also, in order to support the ever-increasing requirements fo r high performance operation, the future DRAM products should be equip ped with the capabilities of low voltage operation and high speed. Thi s paper presents an overview of process technology for deep sub-microm eter devices such as 256 Mbit DRAM based upon current research data an d giga bit DRAMs. Copyright (C) 1996 Elsevier Science Ltd.