TRANSIENT PHENOMENA AND IMPURITY RELOCATION IN SIMS DEPTH PROFILING USING OXYGEN BOMBARDMENT - PURSUING THE PHYSICS TO INTERPRET THE DATA -DISCUSSION

Authors
DRUMMOND IW WITTMACK K
Citation
Iw. Drummond et K. Wittmack, TRANSIENT PHENOMENA AND IMPURITY RELOCATION IN SIMS DEPTH PROFILING USING OXYGEN BOMBARDMENT - PURSUING THE PHYSICS TO INTERPRET THE DATA -DISCUSSION, Philosophical transactions-Royal Society of London. Physical sciences and engineering, 354(1719), 1996, pp. 2764-2764
Citations number
1
Categorie Soggetti
Multidisciplinary Sciences
Journal title
Philosophical transactions-Royal Society of London. Physical sciences and engineering → ACNP
ISSN journal
09628428
Volume
354
Issue
1719
Year of publication
1996
Pages
2764 - 2764
Database
ISI
SICI code
0962-8428(1996)354:1719<2764:TPAIRI>2.0.ZU;2-X