MONTE-CARLO SIMULATION OF NONSPECULAR X-RAY-SCATTERING PROFILES FROM MULTILAYERS

A simple model for calculating nonspecular x-ray scattering (NXRS) pro files from nonideal multilayers is proposed. The model is based on a M onte Carlo method, used to simulate an ''imperfect'' multilayer struct ure, and the kinematical theory of scattering. The influence of uncorr elated, laterally correlated, and vertically correlated interface roug hness on NXRS profiles of multilayers is analyzed. The presence of dif ferent in-plane periodicities and its influence on omega scans and ome ga-2 theta scans is discussed. The simulations show that an interpreta tion of NXRS profiles cannot be performed for a single omega-2 theta o r omega scan, but should be based on the analysis of 1(omega,2 theta) profiles collected over the whole (q(x),q(z)) reciprocal plane.