ANALYSIS OF SHEATH ELECTRIC-FIELDS IN A RADIOFREQUENCY DISCHARGE IN HELIUM

Authors
CHOI YW BOWDEN M MURAOKA K
Citation
Yw. Choi et al., ANALYSIS OF SHEATH ELECTRIC-FIELDS IN A RADIOFREQUENCY DISCHARGE IN HELIUM, JPN J A P 2, 35(11A), 1996, pp. 1459-1461
Citations number
12
Categorie Soggetti
Physics, Applied
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS → ACNP
Volume
35
Issue
11A
Year of publication
1996
Pages
1459 - 1461
Database
ISI
SICI code
Abstract
Electric fields in the sheath region of a radio-frequency discharge in helium were measured using laser induced fluorescence spectroscopy. E lectric field distributions and sheath widths were determined for disc harges operated at pressures in the range of 0.2-1.6 Torr. The experim ental results are found to be predicted well by a theory in which coll isions in the sheath are dominant.