We report a demonstration of the integration of individual polymer-bas
ed light emitting devices of three different colors on the same substr
ate. Orange, green, and blue color devices are sequentially fabricated
on the same indium-tin oxide (ITO) coated glass substrate coated with
a patterned insulator on the ITO, by the spin coating of polymer thin
films, the vacuum deposition of top metal contacts. and the patternin
g of polymer thin film by plasma etching, using the top metal contacts
as the self-aligned etching mask. The devices exhibit no degradation
of device characteristics due to the integration processing compared t
o discrete devices on separate substrates. This demonstration shows a
new path towards the fabrication of high performance low-cost full-col
or organic flat panel displays. (C) 1996 American Institute of Physics
.