Scanning force microscopy has been used to perform a comparative nanos
cale study of domain structures and switching behavior of Pb(ZrxTi1-x)
O-3 (PZT) thin films integrated into heterostructures with different e
lectrodes. The study revealed a significant difference between polariz
ation state of as-deposited PZT films on RuO2 and Pt electrodes. The P
ZT/RuO2 films exhibit polydomain crystallites and show almost symmetri
c switching behavior, while the PZT/Pt films are mainly in a single po
larity state and exhibit highly asymmetric piezoelectric hysteresis lo
ops. Formation of unswitchable polarization within the grains of submi
cron size as a result of fatigue process was directly observed. (C) 19
96 American Institute of Physics.