MICROHARDNESS OF THIN SOLID FILMS

Citation
V. Navratil et V. Stejskalova, MICROHARDNESS OF THIN SOLID FILMS, Physica status solidi. a, Applied research, 157(2), 1996, pp. 339-344
Citations number
10
Categorie Soggetti
Physics, Condensed Matter
ISSN journal
00318965
Volume
157
Issue
2
Year of publication
1996
Pages
339 - 344
Database
ISI
SICI code
0031-8965(1996)157:2<339:MOTSF>2.0.ZU;2-P
Abstract
The microhardness of various thin solid films was measured by using a method based on the calculation of the relative contribution of substr ate and coating to the ''composite'' microhardness value measured for hard coatings on softer substrate. The results obtained confirm the ap plication of the method used and allow to give some conclusions concer ning the influence of the technological process oil the mechanical pro perties of thin films.