HIGH-ENERGY ION-BEAM-INDUCED MODIFICATIONS IN DIAMOND AND DIAMOND-LIKE CARBON THIN-FILMS

Citation
N. Dilawar et al., HIGH-ENERGY ION-BEAM-INDUCED MODIFICATIONS IN DIAMOND AND DIAMOND-LIKE CARBON THIN-FILMS, Vacuum, 47(11), 1996, pp. 1269-1274
Citations number
17
Categorie Soggetti
Physics, Applied
Journal title
VacuumACNP
ISSN journal
0042207X
Volume
47
Issue
11
Year of publication
1996
Pages
1269 - 1274
Database
ISI
SICI code
0042-207X(1996)47:11<1269:HIMIDA>2.0.ZU;2-Q
Abstract
Diamond and DLC thin films deposited using hot-filament chemical vapou r deposition technique at various parameters were irradiated with 50 M eV Si4+ ions. The resulting microstructural changes were studied using X-ray diffraction and scanning electron microscopy. All the samples s howed the development of beta-SiC and hexagonal carbon phases at the e xpense of the diamond/DLC phase. The ERD analysis was carried;out to d etermine the hydrogen concentration and its distribution in DLC films. The absolute hydrogen concentration in DLC samples is of the order of 10(22) atoms/cm(3) which gets depleted on irradiation. The DLC sample s show a clear dependence of hydrogen content on the deposition parame ters. Copyright (C) 1996 Elsevier Science Ltd