DEPOSITION OF COMPOSITE METAL C-H FILMS - THE BASIC PROPERTIES OF AG/C-H/

Authors
BIEDERMAN H HLIDEK P PESICKA J SLAVINSKA D STUNDZIA V
Citation
H. Biederman et al., DEPOSITION OF COMPOSITE METAL C-H FILMS - THE BASIC PROPERTIES OF AG/C-H/, Vacuum, 47(11), 1996, pp. 1385-1389
Citations number
27
Categorie Soggetti
Physics, Applied
Journal title
Vacuum → ACNP
ISSN journal
0042207X
Volume
47
Issue
11
Year of publication
1996
Pages
1385 - 1389
Database
ISI
SICI code
0042-207X(1996)47:11<1385:DOCMCF>2.0.ZU;2-U
Abstract
Composite Ag/C:H films were deposited using an electromagnetron with A g target operated in the de unbalanced mode in a working gas mixture o f n-hexane/Ar. The C:H component of this composite was investigated an d its polymeric nature revealed. Structure, basic optical and de elect rical properties are described with the main emphasis on the ageing pr ocesses. A qualitative explanation is proposed. Copyright (C) 1996 Els evier Science Ltd