UNBALANCED PLANAR MAGNETRON WITH CONTINUOUS CONTROL OF THE OPERATING MODE FROM TYPE-I TO TYPE-II

A compact and simple planar magnetron design is described based on the known concept for modification of the magnetic field by a co-axially placed solenoid. The magnetron unit ensures sufficient values of the p erpendicular B-perpendicular to and the parallel B-= components of the magnetic induction above the target surface allowing for a wide range of variation of the operating mode from type I to the unbalanced type II. The following experimental data characterizing the newly develope d magnetron system are reported: (i) radial distribution of B-= at dif ferent distances above the target surface and at different solenoid cu rrents I-m; (ii) longitudinal distribution of B-perpendicular to along axes parallel to the central one, measured again at different I-m; (i ii) VA-characteristics of the magnetron unit (with a graphite target) for different values of I-m (from 0 to 2.6 A) and at working gas press ure p similar to = 4 Pa Ar). Copyright (C) 1996 Elsevier Science Ltd