RAPID PROTOTYPING OF COMPLEX STRUCTURES WITH FEATURE SIZES LARGER THAN 20 MU-M

Authors
QIN D XIA YN WHITESIDES GM
Citation
D. Qin et al., RAPID PROTOTYPING OF COMPLEX STRUCTURES WITH FEATURE SIZES LARGER THAN 20 MU-M, Advanced materials, 8(11), 1996, pp. 917
Citations number
27
Categorie Soggetti
Material Science
Journal title
Advanced materials → ACNP
ISSN journal
09359648
Volume
8
Issue
11
Year of publication
1996
Database
ISI
SICI code
0935-9648(1996)8:11<917:RPOCSW>2.0.ZU;2-L
Abstract
A rapid, low-cost technique of microfabrication for feature sizes of 2 0 mu m or more is described, which is useful for the rapid production of limited numbers of microsensor and optical structures The pattern c an be designed on a PC and printed out on transparent films of polymer s using a commercial image-setting system. The Figure shows an SEM ima ge of a relief pattern generated on photoresistant film using this met hod.