X-RAY-DIFFRACTION OF PVD TANTALUM COATING S

The aim of this study is to determine residual stresses in Ta thin PVD deposits on steel. The samples are then annealed between 600 and 1100 degrees C producing Ta carbides in the layer. These carbides increase the mechanical properties of the surface. They increase the compressi ve residual stresses in the Ta layer. Compressive stresses about 500 M Pa are measured without annealing and about 1500 MPa for a sample anne aled 1 hour at 1100 degrees C.