GRAZING-INCIDENCE X-RAY REFLECTOMETRY OF MULTILAYER MATERIALS - ENERGY DISPERSION METHOD - COMPARISON OF THEORY AND EXPERIENCE

Authors
DUVAL H MALAURENT JC CAUCHON G DHEZ P
Citation
H. Duval et al., GRAZING-INCIDENCE X-RAY REFLECTOMETRY OF MULTILAYER MATERIALS - ENERGY DISPERSION METHOD - COMPARISON OF THEORY AND EXPERIENCE, Journal de physique. IV, 6(C4), 1996, pp. 409-414
Citations number
5
Categorie Soggetti
Physics
Journal title
Journal de physique. IV → ACNP
ISSN journal
11554339
Volume
6
Issue
C4
Year of publication
1996
Pages
409 - 414
Database
ISI
SICI code
1155-4339(1996)6:C4<409:GXROMM>2.0.ZU;2-M
Abstract
The grazing incidence angle multilayer reflectivity using the Energy D ispersive Method is presented. Reflectivity calculations and measureme nts are used for multilayers exposed to polychromatic X-rays with a se lected incidence angle; this is done for studying in situ, reflectivit y of a Mo/Si deposit during its growth thus permitting a quality contr ol. The method using the 4-40 keV energy range is compared to Spiller' s for which the deposit is controled by soft X-rays.