POSSIBILITY OF THE EXISTENCE OF CONTACT L ITHOGRAPHY OF PERIODIC STRUCTURES WITH SPECIAL DIMENSIONS LESS-THAN WAVE-LENGTH OF ACTINIC EMISSION

Authors
KALITEEVSKAYA NA SEISYAN RP SMIRNOV DV
Citation
Na. Kaliteevskaya et al., POSSIBILITY OF THE EXISTENCE OF CONTACT L ITHOGRAPHY OF PERIODIC STRUCTURES WITH SPECIAL DIMENSIONS LESS-THAN WAVE-LENGTH OF ACTINIC EMISSION, Pis'ma v Zurnal tehniceskoj fiziki, 22(15), 1996, pp. 73-77
Citations number
6
Categorie Soggetti
Physics, Applied
Journal title
Pis'ma v Zurnal tehniceskoj fiziki → ACNP
ISSN journal
03200116
Volume
22
Issue
15
Year of publication
1996
Pages
73 - 77
Database
ISI
SICI code
0320-0116(1996)22:15<73:POTEOC>2.0.ZU;2-7