S. Donati et al., A PC-INTERFACED, COMPACT LASER-DIODE FEEDBACK INTERFEROMETER FOR DISPLACEMENT MEASUREMENTS, IEEE transactions on instrumentation and measurement, 45(6), 1996, pp. 942-947
We describe a laser-diode feedback interferometer for displacement mea
surements with directional discrimination and resolution better than 1
0(-6) m. This new, compact instrument consists of a small optical head
and a signal processing board, which is interfaced to a personal comp
uter. The prototype developed has a dynamic range of 2 m and an accura
cy of about 5 mu m/m, using a corner cube as a remote reflector. Thank
s to PC interfacing, the displacement is directly available in metric
units and errors due to temperature fluctuations can be corrected with
software signal processing.