FABRICATION AND TRANSPORT MEASUREMENTS OF HONEYCOMB SURFACE SUPERLATTICES

Citation
A. Soibel et al., FABRICATION AND TRANSPORT MEASUREMENTS OF HONEYCOMB SURFACE SUPERLATTICES, Semiconductor science and technology, 11(11), 1996, pp. 1756-1760
Citations number
25
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Condensed Matter","Material Science
ISSN journal
02681242
Volume
11
Issue
11
Year of publication
1996
Pages
1756 - 1760
Database
ISI
SICI code
0268-1242(1996)11:11<1756:FATMOH>2.0.ZU;2-W
Abstract
We study a novel surface superlattice structure formed by a honeycomb gate pattern on GaAs/AlGaAs heterostructures with a high-mobility two- dimensional electron gas. The hexagonal gate arrays, fabricated by ele ctron beam lithography, had pitches as small as 150 nm, corresponding to hexagons with 87 nm between adjacent vertices. Magnetoresistance me asurements show features which reflect the presence of the induced hex agonal superlattice potential.