Ea. Kondrashkina et al., HIGH-RESOLUTION GRAZING-INCIDENCE X-RAY-DIFFRACTION FOR CHARACTERIZATION OF DEFECTS IN CRYSTAL-SURFACE LAYERS, Journal of applied physics, 81(1), 1997, pp. 175-183
The peculiarities of high-resolution measurements in grazing-incidence
diffraction (GID) are studied, both theoretically and experimentally.
It is shown that complete discrimination between coherent reflection
and diffuse scattering due to defects in GID requires a three-dimensio
nal mapping of reciprocal space. These measurements can be performed u
sing a combination of analyzer crystal and position-sensitive detector
for angular analysis of scattered x-rays in mutually perpendicular pl
anes. The equations for the resolution function of GID experiments are
given and applied to the interpretation of GID measurements taken fro
m an AlAs/GaAs superlattice. The discrimination of diffuse scattering
due to interfacial roughness in the superlattice is demonstrated. (C)
1997 American Institute of Physics.