The problem of that morphological evolution in a polycrystalline thin
film during annealing is examined by considering a periodic array in a
2D film. The combined motion of the surface moving by diffusion, and
the grain boundary, which moves due to its curvature, is presented as
a self-consistent problem. The analysis of this problem leads to two d
istinct kinetics, namely. (a) film breakup: when the grain size is lar
ger than the film thickness, the surface relaxation is primarily a res
ult of its interaction with a single grain boundary, the groove grows
until the film breaks up: and (b) grain growth: when the two adjacent
grooves interact before breakup happens, grain growth occurs by means
of grain annihilation. Asymptotic analysis of the final stage of grain
annihilation reveals the dependence of the groove velocity on the two
interface energetic. Numerical analysis of boundary/surface motion de
monstrates the morphological evolution with time, and establishes the
conditions of transition between the two different regions. (C) 1997 A
merican Institute of Physics.