DEVELOPMENT OF MECHANICAL-STRESS IN SPUTTERED CR3SI FILMS DURING ANNEALING

Authors
BRUCKNER W WEISE G MATTERN N REISS G
Citation
W. Bruckner et al., DEVELOPMENT OF MECHANICAL-STRESS IN SPUTTERED CR3SI FILMS DURING ANNEALING, Journal of materials science letters, 15(22), 1996, pp. 1935-1937
Citations number
12
Categorie Soggetti
Material Science
Journal title
Journal of materials science letters → ACNP
ISSN journal
02618028
Volume
15
Issue
22
Year of publication
1996
Pages
1935 - 1937
Database
ISI
SICI code
0261-8028(1996)15:22<1935:DOMISC>2.0.ZU;2-L