PREPARATION OF TRANSPARENT AND CONDUCTIVE ZNO THIN-FILMS BY APPLYING A SOLUTION OF ZINC ALKOXIDE

Transparent thin films of ZnO and Al-doped ZnO have been prepared on a glass substrate by a spin-coating method using a solution of zinc di- n-butoxide-2,2'-iminodiethanol-ethanol. Heating temperature of 500 deg rees C was adopted to convert a precursor of ZnO into ZnO(hexagonal wu rtzite structure) polycrystalline films. The films had a high transpar ency in the visible region and resistivities of similar to 10(1) and s imilar to 10(0) Omega . cm for undoped and Al-doped ZnO films, respect ively. Annealing in hydrogen atmosphere reduced the resistivity of the films to similar to 10(-2) and similar to 10(-3) Omega . cm for undop ed and Al-doped ZnO films, respectively, without affecting the optical transmission.