THE USE OF BETHE POTENTIALS IN ZONE-AXIS CBED PATTERN-MATCHING

In recent years quantitative diffraction techniques have been develope d which can obtain accurate low-order structure factors by matching th eoretical calculations to experimental energy-filtered Convergent Beam Electron Diffraction (CBED) patterns. These techniques rely on the ca lculation of accurate diffraction intensities which requires lengthy c omputation. We have previously described a method of reducing computin g times using perturbation theory. In this paper we describe a modific ation to our original zone-axis pattern matching method to include Bet he potentials. The modifications to the pattern matching process are d escribed and the results of structure factor measurements for Si [110] patterns using Bethe potentials are discussed.