T. Matsukawa et al., STM OBSERVATION OF CRATERS ON GRAPHITE SURFACE-INDUCED BY SINGLE-ION IMPLANTATION, Applied surface science, 107, 1996, pp. 227-232
Citations number
12
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
In the course of developing single ion implantation (SII) technology f
or control of doping in semiconductor fine structures and modification
of surfaces/interfaces, both in an atomic scale, defect generation by
single ions in the surface region of graphite has been investigated w
ith scanning tunneling microscopy (STM). Argon ions with acceleration
energy of 30 to 60 keV have been implanted into highly oriented graphi
te crystal, Craters have been formed at the ion incident sites. The fe
ature of craters shows swelling from the undamaged surroundings. The v
olume of the swelling fluctuates among the craters, which reflects the
fluctuation in the number of ion-induced defects near the surface. A
good correlation between the amount of the surface defects and the pro
jected range of each implanted ion has been confirmed by simulation of
cascading. Consequently it has been found that the swelling volume of
individual craters characterized by STM can be a good measure of the
statistical distribution of each implanted ion and ion induced defect
distribution.