K. Fluri et al., INTEGRATED CAPILLARY ELECTROPHORESIS DEVICES WITH AN EFFICIENT POSTCOLUMN REACTOR IN PLANAR QUARTZ AND GLASS CHIPS, Analytical chemistry, 68(23), 1996, pp. 4285-4290
Methods to fabricate planar capillary electrophoresis devices integrat
ed with a postcolumn reactor in fused silica (guard) and Pyrex glass a
re presented. Quartz is etched at similar to 1 mu m/min with a 2.1:1 w
idth-to-depth ratio using a Cr/Au/Cr metal mask and concentrated HF/HN
O3. On-chip postcolumn reaction of o-phthaldialdehyde (OPA) and amino
acids gave theoretical plate numbers up to 83 000 and similar to 90 ms
peak widths, corresponding to 14 plates/V and a 0.5 mu m theoretical
plate height. The reactor geometry caused only a 10% degradation in ef
ficiency.