INSTABILITY OF REACTIVE SPUTTERING IN MAG NETRON DUE TO THE PREPARATION OF BINARY COMPOUND FILMS

Authors
VLADIMIROV VV GORSHKOV VN MOTRICH VA PANCHENKO OA STETSENKO BV SKRIPNIK EF
Citation
Vv. Vladimirov et al., INSTABILITY OF REACTIVE SPUTTERING IN MAG NETRON DUE TO THE PREPARATION OF BINARY COMPOUND FILMS, Zurnal tehniceskoj fiziki, 64(5), 1994, pp. 91-102
Citations number
3
Categorie Soggetti
Physics, Applied
Journal title
Zurnal tehniceskoj fiziki → ACNP
ISSN journal
00444642
Volume
64
Issue
5
Year of publication
1994
Pages
91 - 102
Database
ISI
SICI code
0044-4642(1994)64:5<91:IORSIM>2.0.ZU;2-X